多層SU-8模具

這個(gè)定制的SU-8主模具非常適合實(shí)驗(yàn)室生產(chǎn)的微流控芯片。一個(gè)經(jīng)濟(jì)有效的工具，用于軟鑄聚合物（如PDMS）以及熱壓成型工藝（CoC、PMMA、FlexDYM…）。

可在硅襯底上以高寬高比圖案化多達(dá)4個(gè)SU-8層：

微觀結(jié)構(gòu)布局

微觀結(jié)構(gòu)布局應(yīng)由客戶以適當(dāng)?shù)奈募袷剑?cif、.dwg、.dxf）提供，或由我們的合作伙伴根據(jù)正確的格式進(jìn)行調(diào)整。版圖修改后，在制造之前，將向客戶提供一份pdf文件，以供設(shè)計(jì)終批準(zhǔn)。微觀結(jié)構(gòu)設(shè)計(jì)應(yīng)考慮的主要方面：

文件格式：CIF、DWG或DXF文件。其他格式如DXF也可以接受。所有的結(jié)構(gòu)都應(yīng)該有閉合的輪廓。對(duì)所提供文件的任何修改都將收取額外費(fèi)用。

有效面積：布局必須固定在直徑為90mm的晶圓上。

切割：切割線應(yīng)該畫出來(lái)以備需要。

多層模具：應(yīng)為不同的層提供對(duì)齊標(biāo)記

Multi-layer SU-8 mold多層SU-8模具

Multi-layer SU-8 mold
This custom SU-8 master mold is perfect for your lab production of microfluidic chips. A cost-effective and useful tool for soft casting polymers (like PDMS) as well as hot-embossing processes (COC, PMMA, flexdym...).

Up to 4 SU-8 layers can be patterned with high aspect ratio on silicon substrates:

Microstructure layout
Microstructure layout should be provided by customers in an appropriate file format (.CIF, .DWG, .DXF) or they can be adapted to a correct format by our partner. After the revision of the layout, previously to the manufacturing, a PDF file will be provided to customer for the final approval of the design. The main aspects to be considered in the design of the microstructures:

File format: CIF, DWG or DXF files. Other formats as DXF may be accepted. All the structures should have closed contours. Any adaptation of the provided file will bring an extra charge.
Effective area: Layout must be fixed on 90 mm diameter of the wafer.
Dicing: The cutting lines should be drawn in case they are needed.
Multi-layer Molds: Alignment marks should be provided for the different layers

Multi-layer SU-8 mold多層SU-8模具